Micronix USA
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CUSTOM SYSTEMS

 

  • Custom Project Examples

Symétrie Nanopos Hexapod

  • Resolution in translation: 10 nm
  • Resolution in rotation: 1 μrad
  • Closed loop control with linear optical encoders
  • Height: 65 mm (2.56 in)

Custom Gimbal

  • Angular Resolution: 0.01°
  • Load, max: 50 lbs

XY-ZR Gantry HV

  • XYZ Resolution: < 25 nm
  • Open loop rotation stage on Z-axis
  • High Vacuum

XYZR-ZR Gantry

Thermal Chuck Motion

  • XY-axes: 8 in
  • Z-axis: 0.5 in
  • ± 3.5° manual tip-tilt
  • 10° manual rotation

Probe Motion

  • Z-axis: 4 in
  • Rotation limited by enclosure

XYZ PPS-20 Non-Magnetic

  • X-axis travel: 26 mm
  • Y-axis travel: 11 mm
  • Z-axis travel: 18 mm
  • Resolution: 2 nm
  • Non-magnetic stages

XYZ PPX-32 + PPS-20

  • XYZ travel: 18x18x18 mm
  • Resolution: 5 nm
  • Load, max: 2 kg

XYZ PPS-20 Cryogenic

  • XYZ travel: 12x12x12 mm
  • Cryogenic + Non-magnetic
  • Load, max: 2 kg

XY VT-80 + MTS-65

  • X-axis travel: 300 mm
  • Y-axis travel: 13 mm
  • Load, max: 2 kg

6-DOF PPS-20 HV

  • 6 DOF motion with PPS-20 stages
  • High Vacuum
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