Micronix USA
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NANO POSITIONING - PIEZO

 

  • Linear Piezo Stages
  • Rotary Piezo Stages

Piezo Positioner PP-12

  • Travel: 4 mm
  • Load, max: 0.25 kg
  • Speed, max: 3 mm/s
  • Resolution, typical: 20 nm
  • Repeatability, bi-directional: ± 200 nm
  • Repeatability, uni-directional: 200 nm
  • Encoder Option: Digital

Piezo Positioner PP-18

  • Travel: 12, 18, 26 mm 
  • Load, max: 0.5 kg
  • Speed, max: 2 mm/s
  • Resolution, typical: 40nm
  • Repeatability, bi-directional: ± 200 nm
  • Repeatability, uni-directional: 200 nm
  • Digital linear encoder standard

Precision Piezo Stage PPS-20

  • Travel: 12 - 51 mm
  • Load, max: 2 kg
  • Speed, max: 2 mm/s
  • Resolution, typical: 2 nm
  • Repeatability, bi-directional: ± 20 nm
  • Repeatability, uni-directional: 20 nm
  • Encoder Options: Analog, Digital

Precision Piezo Stage PPS-28

  • Travel: 26 - 102 mm
  • Load, max: 5 kg
  • Speed, max: 10 mm/s
  • Resolution, typical: 1 nm
  • Repeatability, bi-directional: ± 50 nm
  • Repeatability, uni-directional: 50 nm
  • Encoder Options: Analog, Digital

Precision Positioning Stage PPS-60PM

  • Travel: 25 - 300 mm
  • Load, max: 15 kg
  • Speed, max: 5mm/s
  • Resolution, typical: 0.002 μm
  • Repeatability, bi-directional: ± 0.20 μm
  • Repeatability, uni-directional: 0.02 μm
  • Encoder Options: Analog, Digital, Digital Low Cost

Precision Positioning Stage PPS-110PM

  • Travel: 100 - 1000 mm
  • Load, max: 25 kg
  • Speed, max: 5 mm/s
  • Resolution, typical: 2 nm
  • Repeatability, bi-directional: ± 20 nm
  • Repeatability, uni-directional: 20 nm
  • Encoder Options: Digital

Piezo Positioner Cross Stage PPX-32

  • Travel: 18 x 18 mm
  • Load, max: 1 kg
  • Speed, max: 2 mm/s
  • Resolution, typical: 1 nm
  • Repeatability, bi-directional: ± 50 nm
  • Repeatability, uni-directional: 50 nm
  • Encoder Options: Analog, Digital

Precision Piezo XY Stage PPX-50

  • Travel: 30 x 30 mm
  • Load, max: 3 kg
  • Speed, max: 5mm/s
  • Resolution, typical: 1nm
  • Repeatability, bi-directional: ± 20 nm
  • Repeatability, uni-directional: 20 nm
  • Encoder Option: Analog, Digital

Piezo Rotation Stage PR-32

  • Travel: 360°, Continuous
  • Load, max: 1 kg
  • Speed, max: 30°/s
  • Resolution, max: 3.6 μ°
  • Repeatability, bi-directional: ± 220 μ°
  • Repeatability, uni-directional: 220 μ°
  • Encoder Options: Analog, Digital

Piezo Rotation Stage PR-50

  • Travel: 360°, Limitless
  • Load, max: 3 kg
  • Speed, max: 25°/s
  • Resolution, max: 5 μ°
  • Repeatability, bi-directional: ± 220 μ°
  • Repeatability, uni-directional: 220 μ°
  • Encoder Options: Analog, Digital

Precision Gonio Stage PG-50PM

  • Travel: ± 5°, Continuous
  • Load, max: 2 kg
  • Speed, max: 3°/s
  • Resolution, max: 10 μ°
  • Repeatability, bi-directional: ± 2 μ°
  • Repeatability, uni-directional: 2 μ°
  • Encoder Options: Analog,Digital
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