Micronix USA
Phone: 949 480 0538addressFax: 949 480 0538

 

LINEAR MOTION

 

  • Stepper Motor
  • Linear Motor
  • Actuators

Translation Stage VT-21S

  • Travel: 10 mm
  • Load, max: 1 kg
  • Speed, max: 5 mm/s
  • Resolution, typical: 0.05 μm
  • Repeatability, bi-directional: ± 0.2 μm
  • Repeatability, uni-directional: 0.2 μm
  • Encoder Options: Analog, Digital

Translation Stage VT-21L

  • Travel: 26 mm
  • Load, max: 1 kg
  • Speed, max: 5 mm/s
  • Resolution, typical: 0.05 μm
  • Repeatability, bi-directional: ± 0.2 μm
  • Repeatability, uni-directional: 0.2 μm
  • Encoder Options: Analog, Digital

Precision Positioning Stage PPS-20SM

  • Travel: 12 - 51 mm
  • Load, max: 2 kg
  • Speed, max: 4 mm/s
  • Resolution, typical: 0.05 μm
  • Repeatability, bi-directional: ± 0.2 μm
  • Repeatability, uni-directional: 0.2 μm
  • Encoder Options: Analog, Digital

Precision Positioning Stage PPS-28SM

  • Travel: 26 - 102 mm
  • Load, max: 5 kg
  • Speed, max: 4 mm/s
  • Resolution, typical: 0.05 μm
  • Repeatability, bi-directional: ± 0.2 μm
  • Repeatability, uni-directional: 0.2 μm
  • Encoder Options: Analog, Digital

Translation Stage VT-50L

  • Travel: 50 - 300mm
  • Load, max: 20kg
  • Speed, max: 5 mm/s
  • Resolution, typical: 0.05 µm
  • Repeatability, bi-directional: ±0.2 µm
  • Repeatability, uni-directional: 0.2 µm
  • Encoder Options: Analog, Digital

Precision Positioning Stage PPS-60SM

  • Travel: 25 - 300 mm
  • Load, max: 15 kg
  • Speed, max: 5mm/s
  • Resolution, typical: 0.05 μm
  • Repeatability, bi-directional: ± 0.1 μm
  • Repeatability, uni-directional: 0.1 μm
  • Encoder Options: Analog, Digital, Digital Low Cost

Precision Positioning Stage PPS-110SM

  • Travel: 100 - 1000 mm
  • Load, max: 25 kg
  • Speed, max: 10 mm/s
  • Resolution, typical: 50 nm
  • Repeatability, bi-directional: ± 100 nm
  • Repeatability, uni-directional: 100 nm
  • Encoder Options: Digital

Elevation Stage ES-50

  • Travel: 10 mm
  • Load, max: 2 kg
  • Speed, max: 5 mm/s
  • Resolution, typical: 0.05 μm
  • Repeatability, bi-directional: ± 0.2 μm
  • Repeatability, uni-directional: 0.2 μm
  • Encoder Options: Analog, Digital

Elevation Stage PZS-90

  • Travel range of 35mm
  • 100 nm closed loop resolution
  • Load capacity up to 20kg
  • Steel cross roller bearings
  • Integrated mechanical limit switches
  • Vacuum versions available

 

Precision Positioning Stage PPS-20LM

  • Travel: 11, 18, 25mm (other travel lengths available upon request)
  • Load, max: 2 kg
  • Speed, max: 100 mm/s
  • Resolution, typical: 2 nm
  • Repeatability, bi-directional: ± 20 nm
  • Repeatability, uni-directional: 20 nm
  • Encoder Options: Analog, Digital

Precision Positioning Stage PPS-28LM

  • Travel: 26 - 102mm
  • Load, max: 5 kg
  • Speed, max: 100 mm/s
  • Resolution, typical: 2 nm
  • Repeatability, bi-directional: ± 20 nm
  • Repeatability, uni-directional: 20 nm
  • Encoder Options: Analog, Digital

Precision Positioning Stage PPS-60LM

  • Travel: 25 - 300 mm
  • Load, max: 15 kg
  • Speed, max: 100 mm/s
  • Resolution, typical: 0.002 μm
  • Repeatability, bi-directional: ± 0.20 μm
  • Repeatability, uni-directional: 0.02 μm
  • Encoder Options: Analog, Digital, Digital Low Cost

Precision Positioning Stage PPS-110LM

  • Travel: 100 - 1000 mm
  • Load, max: 25 kg
  • Speed, max: 250 mm/s
  • Resolution, typical: 2 nm
  • Repeatability, bi-directional: ± 20 nm
  • Repeatability, uni-directional: 20 nm
  • Encoder Options: Digital

Micro Pusher MP-21

  • Travel: 12, 25 mm
  • Force, max: 40 N
  • Speed, max: 5 mm/s
  • Resolution, typical: 0.1 μm
  • Repeatability, bi-directional: ± 0.5 μm
  • Repeatability, uni-directional: 0.4 μm
  • Encoder Options: None (open loop only)

Precision Actuator MPA-20

  • Travel range of 12mm
  • Gear reduction of 4:1
  • Load capacity up to 10 kg
  • Force, max: 100N
  • Preloaded spline for low backlash
  • Hermetically sealed limit switches, UHV compatible
  • Integrated thermal couple
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