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XYZR-ZR Gantry

Key features

Thermal Chuck Motion

  • XY-axes: 8 in
  • Z-axis: 0.5 in
  • ± 3.5° manual tip-tilt
  • 10° manual rotation

Probe Motion

  • Z-axis: 4 in
  • Rotation limited by enclosure

 

  • Description
  • Specifications
  • Documentation & Part No.

Technical Data not available at this time

The products Configration is not available at this time

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