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Precision Piezo Stage PPS-110

Product Highlights

  • Travel Range:
    100 mm - 1000 mm
  • Encoder Resolution:
    2 nm
  • Repeatability, bi-directional:
    ± 100 nm
  • Repeatability, uni-directional:
    100 nm
  • Max. Speed:
    5 mm/s
  • Max. Load:
    25 kg
  • Encoder Options:
    Digital Encoder
  • Height:
    40 mm
  • Bearing Type:
    Recirculating Ball Bearings

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Description


The PPS-110 is a high-precision, high load, long travel linear stage. It is available with piezo motor, linear motor, or leadscrew drives. Recirculating ball bearings allow for smooth motion and high guiding accuracy for loads up to 25 kg. Closed loop encoder resolution of 2 nm is achievable with a high precision digital encoder.


Specifications


Travel Dependent
Travel Range 100 mm 200 mm 300 mm 500 mm 1000 mm
Straightness, Flatness (µm) ± 3 ± 4 ± 5 ± 10 ± 15
Pitch (µrad) ± 75 ± 100 ± 125 ± 200 ± 300
Yaw (µrad) ± 75 ± 85 ± 100 ± 200 ± 300
Weight (g), Open Loop 1610 2015 2510 3360 5200
Weight (g), Closed Loop 1660 2065 2560 3410 5265
Limit Switch None, Mechanical
Motor Compatibility
Motor Type Piezo Motor
Max. Speed (mm/s) 5 (MMC-110)
Motor/Feedback Dependent Specifications
Encoder Option None (Open Loop) Digital (RS-422)
Typical Resolution (nm) 1 2
Repeatability, bi-directional (nm) N/A ± 100
Repeatability, uni-directional (nm) N/A 100
Load Characteristics
Orientation Fx (N) Fy (N) Fz (N) Mx (N·m) My (N·m) Mz (N·m) kax (µrad/N·m) kay (µrad/N·m)
Max. Load 5 150 250 60 30 35 50 50
Operating Conditions
Environmental Options Atmospheric High Vacuum 10-6 mbar Ultra High Vacuum 10-9 mbar


CAD Files


Product Configurations
3D Preview
CAD
PPS-110-11000
Motor Type
Piezo Motor
Travel Range
100 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Atmospheric
PPS-110-11300
Motor Type
Piezo Motor
Travel Range
100 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Atmospheric
PPS-110-11006
Motor Type
Piezo Motor
Travel Range
100 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
PPS-110-11306
Motor Type
Piezo Motor
Travel Range
100 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
PPS-110-11009
Motor Type
Piezo Motor
Travel Range
100 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-110-11309
Motor Type
Piezo Motor
Travel Range
100 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-110-12000
Motor Type
Piezo Motor
Travel Range
200 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Atmospheric
PPS-110-12300
Motor Type
Piezo Motor
Travel Range
200 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Atmospheric
PPS-110-12006
Motor Type
Piezo Motor
Travel Range
200 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
PPS-110-12306
Motor Type
Piezo Motor
Travel Range
200 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
PPS-110-12009
Motor Type
Piezo Motor
Travel Range
200 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-110-12309
Motor Type
Piezo Motor
Travel Range
200 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-110-13000
Motor Type
Piezo Motor
Travel Range
300 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Atmospheric
PPS-110-13300
Motor Type
Piezo Motor
Travel Range
300 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Atmospheric
PPS-110-13006
Motor Type
Piezo Motor
Travel Range
300 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
PPS-110-13306
Motor Type
Piezo Motor
Travel Range
300 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
PPS-110-13009
Motor Type
Piezo Motor
Travel Range
300 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-110-13309
Motor Type
Piezo Motor
Travel Range
300 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-110-14000
Motor Type
Piezo Motor
Travel Range
500 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Atmospheric
PPS-110-14300
Motor Type
Piezo Motor
Travel Range
500 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Atmospheric
PPS-110-14006
Motor Type
Piezo Motor
Travel Range
500 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
PPS-110-14306
Motor Type
Piezo Motor
Travel Range
500 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
PPS-110-14009
Motor Type
Piezo Motor
Travel Range
500 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-110-14309
Motor Type
Piezo Motor
Travel Range
500 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-110-15000
Motor Type
Piezo Motor
Travel Range
1000 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Atmospheric
PPS-110-15300
Motor Type
Piezo Motor
Travel Range
1000 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Atmospheric
PPS-110-15006
Motor Type
Piezo Motor
Travel Range
1000 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
PPS-110-15306
Motor Type
Piezo Motor
Travel Range
1000 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
PPS-110-15009
Motor Type
Piezo Motor
Travel Range
1000 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-110-15309
Motor Type
Piezo Motor
Travel Range
1000 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-110-11010
Motor Type
Piezo Motor
Travel Range
100 mm
Encoder Option
None (Open Loop)
Limit Switch
Mechanical
Environmental Options
Atmospheric
PPS-110-11016
Motor Type
Piezo Motor
Travel Range
100 mm
Encoder Option
None (Open Loop)
Limit Switch
Mechanical
Environmental Options
High Vacuum 10-6 mbar
PPS-110-11019
Motor Type
Piezo Motor
Travel Range
100 mm
Encoder Option
None (Open Loop)
Limit Switch
Mechanical
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-110-12010
Motor Type
Piezo Motor
Travel Range
200 mm
Encoder Option
None (Open Loop)
Limit Switch
Mechanical
Environmental Options
Atmospheric
PPS-110-12016
Motor Type
Piezo Motor
Travel Range
200 mm
Encoder Option
None (Open Loop)
Limit Switch
Mechanical
Environmental Options
High Vacuum 10-6 mbar
PPS-110-12019
Motor Type
Piezo Motor
Travel Range
200 mm
Encoder Option
None (Open Loop)
Limit Switch
Mechanical
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-110-13010
Motor Type
Piezo Motor
Travel Range
300 mm
Encoder Option
None (Open Loop)
Limit Switch
Mechanical
Environmental Options
Atmospheric
PPS-110-13016
Motor Type
Piezo Motor
Travel Range
300 mm
Encoder Option
None (Open Loop)
Limit Switch
Mechanical
Environmental Options
High Vacuum 10-6 mbar
PPS-110-13019
Motor Type
Piezo Motor
Travel Range
300 mm
Encoder Option
None (Open Loop)
Limit Switch
Mechanical
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-110-14010
Motor Type
Piezo Motor
Travel Range
500 mm
Encoder Option
None (Open Loop)
Limit Switch
Mechanical
Environmental Options
Atmospheric
PPS-110-14016
Motor Type
Piezo Motor
Travel Range
500 mm
Encoder Option
None (Open Loop)
Limit Switch
Mechanical
Environmental Options
High Vacuum 10-6 mbar
PPS-110-14019
Motor Type
Piezo Motor
Travel Range
500 mm
Encoder Option
None (Open Loop)
Limit Switch
Mechanical
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-110-15010
Motor Type
Piezo Motor
Travel Range
1000 mm
Encoder Option
None (Open Loop)
Limit Switch
Mechanical
Environmental Options
Atmospheric
PPS-110-15016
Motor Type
Piezo Motor
Travel Range
1000 mm
Encoder Option
None (Open Loop)
Limit Switch
Mechanical
Environmental Options
High Vacuum 10-6 mbar
PPS-110-15019
Motor Type
Piezo Motor
Travel Range
1000 mm
Encoder Option
None (Open Loop)
Limit Switch
Mechanical
Environmental Options
Ultra High Vacuum 10-9 mbar

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