Micronix USA
Phone: 949 480 0538addressFax: 949 480 0538

 

Precision Piezo XY Stage PPX-50

Key features
  • Travel: 28 x 28 mm
  • Load, max: 3 kg
  • Speed, max: 5mm/s
  • Resolution, typical: 1nm
  • Repeatability, bi-directional: ± 20 nm
  • Repeatability, uni-directional: 20 nm
  • Encoder Option: Analog, Digital

 

 

  • Description
  • Specifications
  • Documentation & Part No.

The PPX-50 is a low profile, long travel, integrated XY stage with an open aperture and a height of only 17.5 mm. Cross roller bearings guarantee smooth and stable motion for loads up to 30 N. It utilizes a multi-phase piezo motor resulting in high speed (>5mm/s) and high blocking force (> 2 N). The PPX-50 is available in open loop or with a linear encoder with a closed-loop esolution of 1 nm. Versions capable of operation in vacuum (10-9 mbar) are available. The PPX-50 is compatible with the MMC-100 and MMC-110 controllers

Travel Dependent Specifications
Travel range [mm] 28x28
Straightness/Flatness [µm] ±3.5
Pitch [µrad] ±200
Yaw [µrad] ±100
Weight [g] 120
Motor Compatibility
Motor option Piezo Motor
Speed, max [mm/s] 2 (MMC-100), 5 (MMC-110)
Motor/Feedback Dependent Specifcations
Encoder option None(open Loop) Analog(1 Vpp) Digital
Resolution, typical [nm] 1 10 1
Repeatability, bi-directional [nm] n/a ±50 ±20
Repeatability, uni-directional [nm] n/a 50 20
Accuracy [µm] - ±1 ±1
Load Characteristics
Orientation Fx [N] Fy [N] Fz [N] Mx [N] My [N] Mz [N]
Load, max 2 2 30 0.6 0.6 0.6
Order no.: PPX-50-
DRIVE          
Piezo Motor, PM-002 1
TRAVEL          
28mm 1
ENCODER          
None 0
Analog (1 Vpp) 2
Digital (RS-422) 3
LIMIT SWITCH          
None 0
ENVIORNMENT          
Atmospheric 0
High Vacuum, 10-6 mbar 6
Ultra High Vacuum, 10-9 mbar 9

Note: please select number to config part number


© 2017 Micronix USA, LLC - All rights reserved.