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Precision Positioning Stage PPS-60PM

Key features
  • Travel: 25 - 300 mm
  • Load, max: 15 kg
  • Speed, max: 5mm/s
  • Resolution, typical: 0.002 μm
  • Repeatability, bi-directional: ± 0.20 μm
  • Repeatability, uni-directional: 0.02 μm
  • Encoder Options: Analog, Digital, Digital Low Cost

 

  • Description
  • Specifications
  • Documentation & Part No.

The PPS-60 is a high-precision, long travel linear stage. The same stage is available with piezo motor, linear motor or stepper motor drives. Ball bearings assure high stiffness and guiding accuracy for loads up to 150N. The PPS-60 is available with an optional linear encoder for increased resolution and repeatability. PPS-60 stages can be mounted in XY without any adapter, and a Z-axis can be added with the use of a standard mounting bracket.

Travel Dependent Specifications
Travel range [mm] 25 50 100 200 300
Straightness/Flatness [µm] ± 2.5 ± 4 ± 6 ± 8 ± 10
Pitch [µrad] ± 50 ± 75 ± 100 ± 125 ± 150
Yaw [µrad] ± 50 ± 75 ± 100 ± 125 ± 150
Motor Compatibility
Motor option Piezo Motor, PM-003
Speed, max [mm/s] 5 (MMC-110)
Motor/Feedback Dependent Specifcations
Encoder option Open Loop Analog

(1 Vpp)

Digital

(RS-422)

Digital

Low Cost

Resolution, typical [µm] 0.001 0.01 0.002 0.5
Repeatability, bi-directional [µm] - ± 0.05 ± 0.02 ±1
Repeatability, uni-directional [µm] - 0.05 0.02 1
Accuracy [µm] - ± 1 ± 1 ± 3
Load Characteristics
Orientation Fx[N] Fy[N] Fz[N] Mx[N·m] My[N·m] Mz[N·m] kax[µrad/N·m] kay[µrad/N·m]
Load, max 5 100 150 10 10 10 100 100
Order no.: PPS-60-
Drive          
Piezo Motor, PM-003 1
Travel          
25 mm 1
50 mm 2
100 mm 3
200 mm 4
300 mm 5
Encoder          
None 0
Analog (1 Vpp) 2
Digital (RS-422) 3
Digital Low Cost, 0.5 μm 4
Limit Switches          
None 0
Mechanical 1
Optical (for digital encoder only) 2
Environment          
Atmospheric 0
High Vacuum, 10-6 mbar 6
Ultra High Vacuum, 10-6 mbar 9

Note: please select number to config part number


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