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Precision Piezo Stage PPS-28

Key features
  • Travel: 26 - 102 mm
  • Load, max: 5 kg
  • Speed, max: 10 mm/s
  • Resolution, typical: 1 nm
  • Repeatability, bi-directional: ± 50 nm
  • Repeatability, uni-directional: 50 nm
  • Encoder Options: Analog, Digital

 

  • Description
  • Specifications
  • Documentation & Part No.

The PPS-28 is a high-precision, long travel linear piezo stage. Miniature crossed roller bearings assure high stiffness and guiding accuracy for loads up to 50 N (horizontal orientation). It utilizes our patent-pending multi-phase piezo motor resulting in high speed (> 2 mm/s) and high blocking force (> 2 N). The PPS-28 is available in open loop or with an external encoder. Closed-loop resolution of 2 nm is achievable. Versions capable of operation in vacuum (10-9 mbar) and/or cryo (4 Kelvin) are available. The PPS-28 is compatible with the MMC-100 and MMC-110 controllers.

Travel Dependent Specifications
Travel range [mm] 26 51 76 102
Straightness/Flatness [µm] ± 1.5 ± 2.5 ± 3 ± 3.5
Pitch [µrad] ± 50 ± 70 ± 80 ± 100
Yaw [µrad] ± 60 ± 75 ± 90 ± 100
Weight [g] 63 125 165 206
Motor Compatibility
Motor option Piezo Motor, PM-002
Speed, max [mm/s] 2 (MMC-100), 10 (MMC-110)
Motor/Feedback Dependent Specifcations
Encoder option None (open loop) Analog (1 Vpp) Digital (RS-422)
Resolution, typical [nm] 1 10 1
Repeatability, bi-directional [nm] n/a ± 50 ± 50
Repeatability, uni-directional [nm] n/a 50 50
Accuracy [µm] - ± 1 ± 1
Load Characteristics
Orientation Fx [N] Fy [N] Fz [N] Mx [N·m] My [N·m] Mz [N·m]
Load, max 2 50 50 1 1 1
Order no.: PPS-28-
Drive          
Piezo Motor, PM-002 1
Travel          
26 mm 1
51 mm 3
76 mm 4
102 mm 5
Encoder          
None (open loop) 0
Analog (1 Vpp) 2
Digital (RS-422) 3
Limit Switch          
None 0
Environment          
Atmospheric 0
High Vacuum, 10-6 mbar 6
Ultra High Vacuum, 10-9 mbar 9

Note: please select number to config part number


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