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Precision Piezo Stage PPS-20

Key features
  • Travel: 12 - 51 mm
  • Load, max: 2 kg
  • Speed, max: 2 mm/s
  • Resolution, typical: 2 nm
  • Repeatability, bi-directional: ± 20 nm
  • Repeatability, uni-directional: 20 nm
  • Encoder Options: Analog, Digital

 

  • Description
  • Specifications
  • Documentation & Part No.

The PPS-20 is a high-precision, long travel linear piezo stage. Miniature crossed roller bearings assure high stiffness and guiding accuracy for loads up to 20 N (horizontal orientation). It utilizes our patent-pending multi-phase piezo motor resulting in high speed (> 2 mm/s) and high blocking force (> 2 N). The PPS-20 is available in open loop or with an external encoder. Closed-loop resolution of 2 nm is achievable. Versions capable of operation in vacuum (10-9 mbar) and/or cryo (4 Kelvin) are available. The PPS-20 is compatible with the MMC-100 and MMC-110 controllers.

Travel Dependent Specifications
Travel range [mm] 12 18 26 51
Straightness/Flatness [µm] ± 1 ± 1.5 ± 1.5 ± 2.5
Pitch [µrad] ± 60 ± 80 ± 80 ± 100
Yaw [µrad] ± 70 ± 90 ± 90 ± 100
Weight [g] 17 24 34 68
Motor Compatibility
Motor option Piezo Motor, PM-002
Speed, max [mm/s] 2 (MMC-100), 10 (MMC-110)
Motor/Feedback Dependent Specifcations
Encoder option None (open loop) Analog (1 Vpp) Digital (RS-422)
Resolution, typical [nm] 1 10 2
Repeatability, bi-directional [nm] n/a ± 50 ± 20
Repeatability, uni-directional [nm] n/a 50 20
Accuracy [µm] - ± 1 ± 1
Load Characteristics
Orientation Fx [N] Fy [N] Fz [N] Mx [N·m] My [N·m] Mz [N·m]
Load, max 2 20 20 0.7 0.7 0.7
Order no.: PPS-20-
Drive          
Piezo Motor, PM-002 1
Travel          
12 mm 1
18 mm 2
26 mm 3
51 mm 5
Encoder          
None (open loop) 0
Analog (1 Vpp) 2
Digital (RS-422) 3
Limit Switch          
None 0
Megnetic 1
Environment          
Atmospheric 0
High Vacuum, 10-6 mbar 6
Ultra High Vacuum, 10-9 mbar 9

Note: please select number to config part number


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