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Piezo Positioner Cross Stage PPX-32

Key features
  • Travel: 18 x 18 mm
  • Load, max: 1 kg
  • Speed, max: 2 mm/s
  • Resolution, typical: 1 nm
  • Repeatability, bi-directional: ± 50 nm
  • Repeatability, uni-directional: 50 nm
  • Encoder Options: Analog, Digital

 

  • Description
  • Specifications
  • Documentation & Part No.

The PPX-32 is a low profile, long travel, integrated XY stage with a height of only 14 mm. Four pre-loaded ball slides guarantee smooth and stable motion for loads up to 10 N. It utilizes a multi-phase piezo motor resulting in high speed (> 2 mm/s) and high blocking force (> 1 N). The PPX-32 is available in open loop or with a linear encoder Closed-loop resolution of 1 nm is achievable. Versions capable of operation in vacuum (10-9  mbar) are available. The PPX-32 is compatible with the MMC-100 and MMC-110 controllers

Travel Dependent Specifications
Travel range [mm] 18 x 18
Straightness/Flatness [µm] ± 2.5
Pitch [µrad] ± 200
Yaw [µrad] ± 100
Weight [g] 40
Motor Compatibility
Motor option Piezo Motor, PM-002
Speed, max [mm/s] 2 (MMC-100), 5(MMC-110)
Motor/Feedback Dependent Specifcations
Encoder option None (open loop) Analog (1 Vpp) Digital (RS-422)
Resolution, typical [nm] 1 10 1
Repeatability, bi-directional [nm] n/a ± 50 ± 50
Repeatability, uni-directional [nm] n/a 50 50
Accuracy [µm] - ± 1 ± 1
Load Characteristics
Orientation Fx [N] Fy [N] Fz [N] Mx [N·m] My [N·m] Mz [N·m]
Load, max 1 1 10 0.6 0.6 0.6
Order no.: PPX-32-
Drive          
Piezo Motor, PM-002 1
Travel          
18 x 18 mm 1
Encoder          
None (open loop) 0
Analog (1 Vpp) 2
Digital (RS-422) 3
Limit Switch          
None 0
Environment          
Atmospheric 0
High Vacuum, 10-6 mbar 6
Ultra High Vacuum, 10-9 mbar 9

Note: please select number to config part number


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