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Precision Positioning Stage PPS-110SM

Key features
  • Travel: 100 - 1000 mm
  • Load, max: 25 kg
  • Speed, max: 10 mm/s
  • Resolution, typical: 50 nm
  • Repeatability, bi-directional: ± 100 nm
  • Repeatability, uni-directional: 100 nm
  • Encoder Options: Digital

 

  • Description
  • Specifications
  • Documentation & Part No.

The PPS-110 is a high-precision, long travel linear stage. It is available with piezo motor, linear motor, or ballscrew drives. Stainless steel recirculating ball bearings allow for smooth motion and high guiding accuracy for loads up to 25kg. Closed loop resolution of 2nm is achievable with a high precision digital encoder.

Travel Dependent Specifications
Travel range [mm] 100 200 300 500 1000
Straightness/Flatness [µm] ±3 ±4 ±5 ±10 ±15
Pitch [µrad] ±75 ±100 ±125 ±200 ±300
Yaw [µrad] ±75 ±85 ±100 ±200 ±300
Motor Compatibility
Motor option 2 Phase Stepper Motor
Speed, max [mm/s] 10 (Higher speed on request)
Motor/Feedback Dependent Specifcations
Encoder option Open Loop Digital (RS-422)
Resolution, typical [µm] 0.1 0.05
Repeatability, bi-directional [µm] ± 2 ± 0.1
Repeatability, uni-directional [µm] 0.2 0.1
Accuracy [µm] - ±1
Load Characteristics
Orientation Fx

[N]

Fy

[N]

Fz

N]

Mx

N·m]

My

[N·m]

Mz

[N·m]

kax

[µrad/N·m]

kay

[µrad/N·m]

Load, max 30 150 250 60 30 35 50 50
Order no.: PPS-110-
DRIVE          
Stepper Motor (SM-008) 2
TRAVEL          
100 mm 1
200 mm 2
300 mm 3
500mm 4
1000mm 5
ENCODER          
None (Open Loop) 0
Digital (RS-422) 3
LIMIT SWITCH          
None 0
Mechanical 1
Optical 2
ENVIRONMENT          
Atmospheric 0
High Vacuum, 10-6 mbar 6
Ultra High Vacuum, 10-9 mbar 9

Note: please select number to config part number


datasheet &manual

Click to download Download Datasheet PPS-110SM manual is not available.

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