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Elevation Stage PZS-90

Key features
  • Travel range of 35mm
  • 100 nm closed loop resolution
  • Load capacity up to 15kg
  • Steel cross roller bearings
  • Integrated mechanical limit switches
  • Vacuum versions available

 

  • Description
  • Specifications
  • Documentation & Part No.

The PZS-90 elevation stage is designed for application with limited space conditions. Pre-loaded cross roller bearings assure smooth motion and high stiffness. The PZS-90 allows for a highly rigid XZ or XYZ setup without the need for adapter brackets when combined with the VT-50L series & PPS-60 series of linear stages. The PZS-90 stage is driven by a 2-phase stepper motor and is equipped with two mechanical limit switches. An optional linear encoder provides higher accuracy versus the open loop option. Versions capable of operation in vacuum (10-6 mbar) are available. The PZS-90 is compatible with the MMC-200 controller.

Travel Dependent Specifications
Travel range [mm] 35
Straightness/Flatness [µm] ± 3
Pitch [µrad] ± 200
Yaw [µrad] ± 200
Weight [g] 1145
Motor Compatibility
Motor option 2-Phase Stepper Motor, SM-003
Speed, max [mm/s] 10
Motor/Feedback Dependent Specifcations
Encoder option None (open loop) Analog (1 Vpp) Digital (RS-422) Digital Low Cost (RS-422)
Resolution, typical [µm] 0.5 0.1 0.1 0.5
Repeatability, bi-directional [µm] ± 2 ± 0.1 ± 0.1 ± 1
Repeatability, uni-directional [µm] 0.5 0.1 0.1 1
Accuracy [µm] ± 15 ± 1 ± 1 ± 3
Load Characteristics
Orientation Fx [N] Fy [N] Fz [N] Mx [N·m] My [N·m] Mz [N·m] k?x [µrad/N·m] k?y [µrad/N·m]
Load, max 75 75 150 50 50 100 50 50
Order no.: PZS-90-
Drive          
Stepper Motor, SM-003 1
Travel          
35 mm 1
Encoder          
None 0
Analog (1 Vpp) 2
Digital (RS-422) 3
Digital Low Cost 4
Limit Switches          
Mechanical 1
Environment          
Atmospheric 0
High Vacuum, 10-6 mbar 6

Note: please select number to config part number


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