Elevation Stage PZS-90
- Documentation & Part No.
The PZS-90 elevation stage is designed for application with limited space conditions. Pre-loaded cross roller bearings assure smooth motion and high stiffness. The PZS-90 allows for a highly rigid XZ or XYZ setup without the need for adapter brackets when combined with the VT-50L series & PPS-60 series of linear stages. The PZS-90 stage is driven by a 2-phase stepper motor and is equipped with two mechanical limit switches. An optional linear encoder provides higher accuracy versus the open loop option. Versions capable of operation in vacuum (10-6 mbar) are available. The PZS-90 is compatible with the MMC-200 controller.
|Travel range [mm]||35|
|Straightness/Flatness [µm]||± 3|
|Pitch [µrad]||± 200|
|Yaw [µrad]||± 200|
|Motor option||2-Phase Stepper Motor, SM-003|
|Speed, max [mm/s]||10|
|Encoder option||None (open loop)||Analog (1 Vpp)||Digital (RS-422)||Digital Low Cost (RS-422)|
|Resolution, typical [µm]||0.5||0.1||0.1||0.5|
|Repeatability, bi-directional [µm]||± 2||± 0.1||± 0.1||± 1|
|Repeatability, uni-directional [µm]||0.5||0.1||0.1||1|
|Accuracy [µm]||± 15||± 1||± 1||± 3|
|Orientation||Fx [N]||Fy [N]||Fz [N]||Mx [N·m]||My [N·m]||Mz [N·m]||k?x [µrad/N·m]||k?y [µrad/N·m]|