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Precision Positioning Stage PPS-20LM

Key features
  • Travel: 11, 18, 25mm (other travel lengths available upon request)
  • Load, max: 2 kg
  • Speed, max: 100 mm/s
  • Resolution, typical: 2 nm
  • Repeatability, bi-directional: ± 20 nm
  • Repeatability, uni-directional: 20 nm
  • Encoder Options: Analog, Digital

 

  • Description
  • Specifications
  • Documentation & Part No.

The PPS-20 Linear Motor version is suitable for applications requiring very fast speeds. Miniature crossed roller bearings assure high stiffness and guiding accuracy for loads up to 20 N (horizontal orientation). The PPS-20LM is available with either an analog or digital encoder. Closed loop resolution of 2 nm is achievable. The PPS-20LM is compatible with the MMC-300 controller.

Travel Dependent Specifications
Travel range [mm] 11 18 25
Straightness/Flatness [µm] ± 1 ± 1.5 ± 1.5
Pitch [µrad] ± 60 ± 80 ± 80
Yaw [µrad] ± 70 ± 90 ± 90
Motor Compatibility
Motor option Voice Coil Linear Motor
Speed, max [mm/s] 100
Motor/Feedback Dependent Specifcations
Encoder option Analog (1vpp) Digital (RS-422)
Resolution, typical [nm] 10 2
Repeatability, bi-directional [µm] ± 0.05 ± 0.02
Repeatability, uni-directional [µm] 0.05 0.02
Accuracy [µm] ± 1 ± 1
Load Characteristics
Orientation Fx [N] Fy [N] Fz [N] Mx [N·m] My [N·m] Mz [N·m]
Load, max 1 20 20 0.7 0.7 0.7
Order no.: PPS-20-
Drive          
Linear Motor, LM-003 3
Travel          
11 mm 1
18 mm 2
25 mm 3
Encoder          
Analog (1 Vpp) 2
Digital (RS-422) 3
Limit Switch          
None 0
Magnetic 1

Optical

(*only available with Digital encoder)

2
Environment          
Atmospheric 0

Note: please select number to config part number


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