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Elevation Stage ES-50

Key features
  • Travel: 10 mm
  • Load, max: 2 kg
  • Speed, max: 5 mm/s
  • Resolution, typical: 0.05 μm
  • Repeatability, bi-directional: ± 0.2 μm
  • Repeatability, uni-directional: 0.2 μm
  • Encoder Options: Analog, Digital

 

  • Description
  • Specifications
  • Documentation & Part No.

The ES-50 elevation stage is designed for applications with limited space conditions. The ES-50 stage is driven by a 2-phase stepper motor and is equipped with two mechanical limit switches. Two pre-loaded ball slides assure smooth motion and high stiffness. The ES-50 allows for a highly rigid XYZ setup without the need for adapter brackets when combined with the VT-50 series of linear stages. Versions capable of operation in vacuum (10-6 mbar) are available. The ES-50 is compatible with the MMC-200 controller.

Travel Dependent Specifications
Travel range [mm] 10
Straightness/Flatness [µm] ± 4
Pitch [µrad] ± 300
Yaw [µrad] ± 300
Weight [g] 110
Motor Compatibility
Motor option 2-Phase Stepper Motor, SM-001
Speed, max [mm/s] 5
Motor/Feedback Dependent Specifcations
Encoder option None (open loop) Analog (1 Vpp) Digital (RS-422)
Resolution, typical [µm] 0.5 0.05 0.05
Repeatability, bi-directional [µm] ± 2 ± 0.2 ± 0.2
Repeatability, uni-directional [µm] 0.5 0.2 0.2
Accuracy [µm] - ± 1 ± 1
Load Characteristics
Orientation Fx [N] Fy [N] Fz [N] Mx [N·m] My [N·m] Mz [N·m]
Load, max 5 5 20 1 1 1
Order no.: ES-50-
Drive          
Stepper Motor, SM-001 1
Travel          
10 mm 1
Encoder          
None (open loop) 0
Analog (1 Vpp) 2
Digital (RS-422) 3
Limit Switch          
Mechanical 1
Environment          
Atmospheric 0
High Vacuum, 10-6 mbar 6

Note: please select number to config part number


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